旋涂法制备纳米有机/无机复合膜成膜过程的研究  

Preparation Process of Nanosized Organic/Inorganic Thin Films by Sol-Gel Spin-coating Method

作　　者：李琰[1] 潘庆谊[1] 张剑平[1] 程知萱[1] 陈海华[1] 

机构地区：[1]上海大学理学院化学系,上海200436

出　　处：《无机材料学报》2004年第5期1065-1072,共8页Journal of Inorganic Materials

基　　金：上海市纳米专项(0352nm068)

摘　　要：以醋酸镍为原料采用改进的溶胶-凝胶法制备了PEG6000/纳米Ni(OH)2复合溶胶,粘度法确定了溶胶的稳定区域,稳定溶胶有两种流型:牛顿体和假塑体.以稳定溶胶牛顿体配方采用旋涂法制备了纳米NiO薄膜.研究表明,在旋转涂膜过程中旋转角速度(ω)、旋涂液表观粘度(η)、纳米Ni(OH)2含量(M)是影响薄膜厚度(d)的主要因素,符合关系式:d=K .溶胶的流变型影响薄膜质量:以牛顿体制备的薄膜表面较平整,而以假塑体制备的薄膜表面起伏不平. Ni(OH)2和PEG6000的相对含量主要影响薄膜表面孔隙度,Ni(OH)2含量低而PEG6000含量高,则薄膜表面纳米NiO粒子排列较为稀疏,反之则排列较为紧密.多次涂膜可得均匀致密的薄膜.PEG6000/nano-Ni(OH)2 sol was prepared by a modified sol-gel method with Ni(Ac)2. The stable region of the sol was definited by measuring the viscosity of the sol. Furthermore the flow patterns of the stable sol were studied and the results show that the stable sol has two flow patterns: Newtonian and pseudoplastic fluid. With the Newtonian fluid of the stable sol, the nano-NiO thin films were produced by the spin-coating method. The research results indicate that the thickness of the film (d) is largely determined by the factors including angular velocity (ω), the apparent viscosity of the sol (η) and the content of Ni(OH)2(M) to the equation: d = K . The quality of the films is influenced by the flow patterns and the content of PEG of the stable sol. The surfaces of the thin films with Newtonian sol are smooth while those with pseudoplastic sol are rough and wavy. The surfaces of nano-NiO films with high content of Ni(OH)2 and low content of PEG6000 are compact and dense while those with low content of Ni(OH)2 and high content of PEG6000 are loose.

关 键 词：纳米NIO 薄膜 溶胶—凝胶旋涂法 溶胶流变学 

分 类 号：TB43[一般工业技术]