TiAlBN多元膜的性能与组织结构研究  

Study of Performances and Microstructure of TiAlBN Films

作　　者：谢致薇[1] 王国庆[2] 杨元政[1] 白晓军[1] 匡同春[3] 谢光荣[1] 胡社军[1] 

机构地区：[1]广东工业大学材料与能源学院,广东广州510643 [2]广东工业大学轻工化工学院,广东广州510080 [3]广东工业大学实验研究中心,广东广州510080

出　　处：《钛工业进展》2004年第3期24-29,共6页Titanium Industry Progress

摘　　要：采用电弧离子镀技术、TA5钛合金靶沉积TiAlBN薄膜 ,研究了这种多元膜的显微硬度、高温氧化性能和组织结构 ,结果表明 :这种多元膜具有优于TiN膜的显微硬度 ;不同于TiN膜的显微组织 ,其最显著的特征是存在一些细小的钛滴 ;双靶工作状态下 ,这些钛滴与膜之间的融合效果较好 ,膜层表面孔隙较少 ;薄膜具有TiN的面心立方结构 ,与TiN膜相比 ,具有更加明显的择优取向趋势。TiAlBN films have been deposited by cathode arc ion-plating with TA5 titanium alloy target. The performance and microstructure have been studied. The results show that the microhardness of the multi-component films is higher than that of TiN films. The films have better high temperature oxidation performance than that of TiN films. The microstructure of the multi-component films is quite different from TiN films. The microstructure of the multi-component films is characteristic of some small titanium droplets. The titanium droplets are combined with the films substrate and there are a few pores in the films surface in the condition of double targets. It is found that the preferred orientation exists in the films.

关 键 词：TiAlBN 多元膜 性能 组织结构 电弧离子镀 氮化物 

分 类 号：TB43[一般工业技术]