压力传感器热零点漂移补偿各种计算方法的比较  

Comparing the Different Arithmetic Methods for the Offset Drift Compensation of Pressure Sensor

作　　者：苏亚[1] 孙以材[1] 李国玉[1] 

机构地区：[1]河北工业大学微电子所,天津300130

出　　处：《传感技术学报》2004年第3期375-378,共4页Chinese Journal of Sensors and Actuators

摘　　要：压力传感器在实际应用中 ,由于力敏电阻器的不匹配及其漏电流的影响会产生零点漂移现象。这种现象在一定程度上影响了压力传感器的精度。随着压力传感器的应用范围不断扩大 ,对测量准确度的要求不断提高 ,因此对零点漂移的校正就成为一个重要的研究课题。在计算机技术广泛应用的今天 ,使得对压力传感器的零点漂移及非线性软件补偿成为可能。本文结合目前应用比较普遍的各种补偿计算方法 ,通过编制程序 ,对压力传感器热零点漂移现象作了补偿。结果表明 ,非线性函数多项式拟合规范化方法和神经网络法拟合出的数据精度很高 ,取得了其他方法无法达到的补偿效果。The offset thermal drift of pressure sensor is influenced by piezoresistor mismatch and its leakage current in practical applications. They affect the measurement accuracy of pressure sensor. Since the pressure sensors are applied in a numerous fields and the measured data should be quite accurate, the offset thermal drift of pressure sensor is a serious problem that must be solved. Computer science has developed more quickly at present, so we can compensate it by software on SCM. We use varied kind of arithmetic methods that are programmed on computer. The calculation results show that the normalized polynomial-match for non-linear function and neural network can match experimental data more accurate than other arithmetic methods for compensating the offset thermal drift of pressure sensor.

关 键 词：压力传感器 热零点漂移 温度补偿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP183[自动化与计算机技术—控制科学与工程]