MEMS悬臂式开关的失效分析  

Fatigue Analysis of MEMS Cantilevered Switch

作　　者：徐欣[1] 郭方敏[1,2] 葛羽屏[1] 李成诗[1] 于绍欣[1] 朱荣锦[1] 赖宗声[1] 朱自强[1] 王跃林[2] 陆卫[3] 

机构地区：[1]华东师范大学信息科学和技术学院,上海200062 [2]中国科学院上海微系统与信息技术研究所,传感技术国家重点开放实验室,上海200050 [3]中国科学院上海技术物理所,红外物理国家重点实验室,上海200083

出　　处：《传感技术学报》2004年第3期492-496,共5页Chinese Journal of Sensors and Actuators

基　　金：国家 973<集成微光机电系统研究>(G19990 3 3 10 5 ) ;国家杰出青年基金 (6 992 5 4 0 9) ;国家自然科学基金 (1 0 374 0 95 ) ;上海 -应用材料研究与发展基金项目资助 (0 30 6 ) .

摘　　要：介绍了一种表面微机械系统开关 ,悬臂材料为Au SiOxNy Au铬金作为电欧姆接触。用静电激励 (激励电压为 1 3V)方式 ,测试其隔离度。获得结果为微机械开关在 1～ 4 0GHz的范围内隔离度可高达 35dB。我们采用对开关施加激励方波脉冲的方法测试寿命。结果寿命接近 1 0 5,应用ANSYS对几种不同的MEMS射频接触悬臂开关模型进行了力电耦合分析和失效机理。A surface micro-electro-machined system miniature switch has been made on Si substrate using a suspended switch with gold / SiO x N y /gold micro-beam as the cantilevered arm, a chromium-to-gold electrical contact, and electrostatic actuation as the switching mechanism. The actuation voltage is measured to be 13 V, and electric isolation is obtained greater than 35 dB operating in a range from 1 to 40 GHz. The switch has been inserted into a time domain setup and their lifetimes have been characterized as a function of actuated voltage. Switch lifetimes were 105 switch actuation over. We simulate electrostatic and mechanical energy coupled and failure models of MEMS RF suspended beam contact switch by using ANSYS, demonstrating some relationship among lifetime and threshold voltage, frayed, rupture, fatigue failure and so on.

关 键 词：寿命 悬臂接触式开关 驱动电压 失效 ANSYS 

分 类 号：TN405[电子电信—微电子学与固体电子学]