分子束研究气体分子在表面吸脱附动力学  

Studies on adsorption-desorption kinetics of gas molecules on surface with molecular beam technique

作　　者：席光康[1] 

机构地区：[1]南开大学电子科学系,天津300071

出　　处：《真空》2004年第4期49-54,共6页Vacuum

摘　　要：分子束技术与表面电子谱、气体质谱分析技术相结合 ,形成分子束 -表面散射谱 ,它是研究气体 -表面相互作用动力学的有力工具。它的主要突破在于从分子 (原子 )量度来揭示诸如表面吸附、脱附、催化、腐蚀和能量适应等气体 -表面作用过程。本文首先概述了表面吸附、脱附过程及类型 ,接着叙述了本实验室自行研制的分子束 -表面散射装置的总体设计及用来研究表面吸脱附的实验技术。Molecular beam technique was combined with electron spectroscopy and mass spectrometer to form a molecular beam-surface scattering spectrum apparatus as a powerful tool for investigating kinetics and dynamics of gas-surface interactions. It is a breakthrough in the field of molecular (atomic) measurement of macroscopic gas-surface processes such as catalysis, corrosion, adsorption, desorption and energy accommodation. With a brief description of adsorption and desorption processes and their types given, the overall design of the molecular beam-surface scattering spectrum apparatus we developed to use in our lab is outlined, as wll as the experimental techniques for investigating gas-surface adsorption and desorption. Some examples are given for the application of these techniques.

关 键 词：分子束技术 表面电子谱 气体质谱分析 分子束-表面散射谱 吸附-脱附动力学 

分 类 号：TB714[一般工业技术—真空技术] O647.32[理学—物理化学]