喷雾热解法制备薄膜技术  

SPRAY PYROLYSIS TECHNIQUE USED TO PREPARED THIN FILMS

作　　者：宫华[1] 刘开平[1] 

机构地区：[1]长安大学材料工程系,西安710054

出　　处：《中国陶瓷》2004年第5期33-36,共4页China Ceramics

摘　　要：介绍了喷雾热解法制备薄膜技术,综述了喷雾热解法制备薄膜的研究进展,着重介绍了喷雾热解法制备铁电薄膜的研究,以及等离子体增强喷雾热解法制备薄膜技术。The spray pyrolysis technique used to prepare thin films was introduced in the paper. Therecent studies on the thin films prepared by spray pyrolysis were reviewed. Especially,ferroelectric thinfilms prepared by spray pyrolysis and plasma-enhanced spray pyrolysis technique were introduced in detail.

关 键 词：喷雾热解法 静电雾化沉积 等离子体增强喷雾热解法 

分 类 号：TN304.055[电子电信—物理电子学]