TiAl过渡层对电弧离子镀沉积TiAlN膜层的影响  

Influence of the TiAl Interlayer on TiAlN Coating Deposited by Arc Ion Plating

作　　者：宋贵宏[1] 郑静地[2] 刘越[2] 孙超[2] 

机构地区：[1]沈阳工业大学材料科学与工程学院,沈阳110023 [2]中国科学院金属研究所,沈阳110015

出　　处：《人工晶体学报》2004年第3期422-427,共6页Journal of Synthetic Crystals

摘　　要：利用电弧离子镀 ,在不锈钢和SiCp 增强 2 0 2 4铝基复合材料基底上沉积TiAlN薄膜。结果表明 :TiAlN膜层直接沉积在不锈钢基底上 ,膜层呈 [111]择优取向 ;然而 ,TiAlN膜层沉积在不锈钢基底的TiAl过渡层上 ,膜层呈 [2 2 0 ]方向择优取向 ;并且随着过渡层从零开始增厚 ,TiAlN膜层的织构系数T(111)逐渐减小 ,而T(2 0 0 )逐渐增大 ,但膜层一直以 [2 2 0 ]方向择优取向 ,内应力的存在可能是膜层产生 [2 2 0 ]方向择优取向的原因。在复合材料基底TiAl过渡层上沉积 ,随着负脉冲偏压的增加 ,TiAlN膜层的择优取向由 [111]向 [2 0 0 ]转变。在不锈钢基底上 ,没有TiAl过渡层时 ,膜层表面相对光滑 ,大颗粒较少 ;有了TiAl过渡层 ,表面大颗粒较多 ;TiAl过渡层不同沉积时间对膜层表面影响不大 ,颗粒尺寸相差无几。没有TiAl过渡层时 ,膜层结合强度很差 ,有了TiAl过渡层 ,结合强度明显增加 ,但结合强度的大小随过渡层沉积时间 (厚度 )变化。The TiAlN coatings were deposited on stainless steel and 2024-SiC_p composite substrate by arc ion plating. Results show that the TiAlN coatings directly deposited on stainless steel substrate have a markedly preferred orientation of [111]. However, on the TiAl interlayer deposited on stainless steel substrate,the texture coefficient T(111) of the TiAlN coating gradually decreases and T(200) gradually increases with the thickness of TiAl interlayer increasing, but the preferred orientation of coatings keeps [220] regardless of the thickness of the TiAl interlayer on stainless steel substrate. The [220]preferred orientation of coatings may be due to the internal stress in coatings. On the TiAlN coatings deposited on 2024-SiC_p composite, the preferred orientation of coatings gradually transforms from [111] into [200] with negative pulse bias increasing. The surface morphology of coatings without interlayer is very smooth with little micro-particles, whereas the coatings with interlayer is rough with more and big micro-particles. The thickness of interlayer has little influence on the surface morphology of coatings and the size of micro-particles. The TiAl interlayer substantially increases the adhesive strength of TiAlN coatings, but the adhesive strength varis with the thickness of TiAl interlayer.

关 键 词：TIAL 过渡层 各向异性 内应力 复合材料 

分 类 号：O484.1[理学—固体物理]