等径控制系统的改进及在光学级铌酸锂生长中的应用  

Improvement of Diameter-constant Control System and Its Application in the Growth of Optical Grade Lithium Niobate Crystals

作　　者：孙军[1] 孔勇发[1] 李兵[1] 张玲[1] 刘士国[1] 黄自恒[1] 瓮松峰[2] 舒永春[1] 许京军[1] 

机构地区：[1]南开大学光电材料研发中心 [2]天津大学机械工程学院,天津300072

出　　处：《人工晶体学报》2004年第3期305-309,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金 ( 60 10 80 0 1) ;"863"( 2 0 0 1AA3 13 0 2 0 );天津市重大科技攻关 ( 0 0 3 10 8911)资助项目

摘　　要：分析了提拉法晶体生长过程中影响滞后变化的因素 ,采用传统PID调节器和计算机辅助控制相结合的办法 ,解决了铌酸锂晶体生长过程中的精确等径控制问题 ,并在大直径铌酸锂晶体生长应用中取得了满意的效果。生长的 76mm直径的铌酸锂晶体 ,生长条纹问题得到很大改善 ,光学均匀性提高了一个量级以上。Various factors affecting the control of crystal growth and the relationship among these factors were analyzed. A mathematic model on adjusting the parameters of PID controller and monitoring it was built up. According to this model, a set of diameter-constant control system was designed. Using this control system, 76mm in diameter optical grade lithium niobate crystals were successfully grown. These crystals show smooth surface from shoulder, body to tail. The gradient of extraordinary refractive index through the growth length of 50 mm is less than 3×10^(-5), which is one order of magnitude smaller than that of the crystal grown by traditional control system.

关 键 词：等径控制系统 铌酸锂 生长工艺 晶体提拉法 控制器 

分 类 号：O782[理学—晶体学] TP273[自动化与计算机技术—检测技术与自动化装置]