疏水型纳米SiO_2增透薄膜的制备与性能研究  

Study of the Preparation and Properties of Nano-structure Hydrophobic and Anti-reflective Silica Films

作　　者：姚兰芳[1] 解德滨[1] 肖轶群[1] 沈军[1] 吴广明[1] 王珏[1] 

机构地区：[1]同济大学波耳固体物理研究所

出　　处：《材料科学与工程学报》2004年第4期502-504,共3页Journal of Materials Science and Engineering

基　　金：国家自然科学基金重点资助项目 (2 0 1 330 4 0 ) ;国家高新技术 863计划资助项目 (2 0 0 2AA842 0 52 ) ;上海市科委中法合作资助项目(0 2SL0 0 1 )

摘　　要：采用溶胶—凝胶技术 ,以正硅酸乙酯 (TEOS)为有机醇盐前驱体 ,无水乙醇 (EtOH)为溶剂 ,在碱催化体系中通过选择合适的原料的比例 ,制得碱性的增透膜 ,然后对所得的薄膜进行表面修饰 ,制得既有增透性质又有疏水性的增透膜 ,克服了增透膜防潮性能差的缺点。采用椭偏仪、傅立叶型红外分光光度计、UV VIS NIR分光光度计和接触角测试仪对膜的折射率、厚度、红外特性、透过光谱、接触角进行表征。Silicate sols were obtained from tetraethoxysilane (TEOS) dissolved in ethanol in base catalyzed system by sol-gel process. Both hydrophobic and anti-reflective silica films were prepared by the dip-coating technique from the sols and surface modification. As a result, the moisture-resistant ability of anti-reflective coating was highly improved. Ellipsometry, FTIR, UV-VIS-NIR spectrophotometry and contact angle instrument are used to measure the physical properties of the films.

关 键 词：增透薄膜 溶胶-凝胶 疏水性 表面修饰 增透 

分 类 号：TB383[一般工业技术—材料科学与工程]