添加元素对TiMeXN多元膜XPS谱的影响  

Alloy-Addition and XPS Spectra of TiMeXN Films

作　　者：谢致薇[1] 王国庆[2] 杨元政[1] 匡同春[3] 白晓军[1] 成晓玲[3] 谢光荣[1] 胡社军[1] 

机构地区：[1]广东工业大学材料与能源学院,广州510643 [2]广东工业大学轻工化工学院,广州510080 [3]广东工业大学实验研究中心,广州510080

出　　处：《真空科学与技术学报》2004年第3期208-212,215,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：采用XPS方法研究了TiMeXN多元膜内各元素的化学状态 ,结果表明 ,添加元素改变了TiN中Ti元素特征峰的位置和形状。首先 ,使Ti、N峰强度增大 ,O峰强度减弱 ;其次 ,使Ti2p1 / 2 峰、Ti2p3 / 2 峰和N 1s的双峰现象基本消失 ,氮化物薄膜中Ti的化学状态基本趋于一致 ;再次 ,随着微量元素总含量的增高 ,Ti2p峰的多重分裂值减小 ,直至使Ti2p1 / 2 峰和Ti2p3 / 2 峰部分重迭。在多元膜中 ,微量添加元素本身以“正离子”或“负离子”的形式存在 。The chemical states of the constituent elements in multi component films,grown by vacuum cathodic arc deposition(VCAD) on high speed steel substrate,were studied with X ray photoelectron spectroscopy (XPS).The results show that the added elements change the Ti characteristic peak position and shape of TiN in the XPS spectra as follows:1).an increase of Ti and N peak intensities coinciding with lowering of O peak,2).disappearance of double peaks of Ti2 p 1/2 ,Ti2 p 3/2 ,and N 1 s and 3). a decrease of separation between Ti2 p 1/2 ,and Ti2 p 3/2 peaks.We suggest that the added element,acting as either cations or anions,may form tiny 2 nd phases.

关 键 词：多元膜 真空阴极电弧沉积 X射线光电子能谱 TiMeXN 高速钢 

分 类 号：TG174.44[金属学及工艺—金属表面处理]