扫描质子微探针的安装调试及象差控制  

Installation, adjustment and aberration control of a scanning proton microprobe

作　　者：毛羽[1] 朱卫华[1] 王志山[1] 陈汉民 徐建波 

机构地区：[1]中国科学院上海原子核研究所,上海201800

出　　处：《核技术》1993年第9期526-530,共5页Nuclear Techniques

摘　　要：讨论了扫描质子微探针(SPM)安装调试的方法,通过象差调整,提高了SPM系统的空间分辨率。该系统可提供空间分辨率为2-3μm、束流强度为100pA的3MeV H^+束和2MeV He^+束。In the paper a method to install and adjust the scanning proton microprobe at SINR was described. The resolution of the SPM was improved and reached 2-3μm for 3MeV H+ and 2MeV He+ beams at a current intensity of 100pA by the aberration control.

关 键 词：质子微探针 象差控制 安装 SPM 

分 类 号：TH744[机械工程—光学工程]