柔性衬底Zn-Sn-O透明导电膜的特性  

Properties of conducting transparent Zn-Sn-O films deposited on organic substrates

作　　者：黄树来[1] 姜永超[1] 盖凌云[2] 孙玉林[1] 徐进栋[1] 

机构地区：[1]莱阳农学院理学院,山东莱阳265200 [2]石油大学资源与信息学院

出　　处：《莱阳农学院学报》2004年第3期245-248,共4页Journal of Laiyang Agricultural College

基　　金：国家自然科学基金项目(No.60276044)

摘　　要：采用射频磁控溅射技术首次在有机薄膜衬底上低温制备出具有低电阻率和良好附着性的Zn-Sn-O透明导电膜。研究了有机衬底和玻璃衬底Zn-Sn-O薄膜的结构、表面形貌和组分。制备薄膜为非晶结构,有机衬底Zn-Sn-O透明导电膜的最低电阻率和可见光平均透过率分别为1.3×10-2Ω·cm和82%。薄膜中的氧偏离理想化学配比,存在着较多的氧空位,氧空位是薄膜中载流子的主要来源。Transparent conducting Zn-Sn-O films with low resistivity and good adhesion were deposited on organic substrates by r.f. magnetron sputtering at room temperature. Structural and composition of Zn-Sn-O films have been investigated. The deposited films are amorphous. The films deposited on organic substrates have a optimal resistivity ～ 1.3×10^-2(Ω·cm and average transmittance in the visible region ～82%. There is short of oxygen regarding to Zn-Sn-O target, which is the dominating reason that the deposited films have a lower resistivity.

关 键 词：有机衬底 锌-锡-氧透明导电膜 射频磁控溅射技术 结构 表面形貌 组分 

分 类 号：TM24[一般工业技术—材料科学与工程]