金属材料次表面缺陷成像检测系统及其应用  

Structure and Application of a Sub-surface Mapping System for Examiningthe Defects of Metal Material

作　　者：沈剑峰[1] 施柏煊[1] 

机构地区：[1]现代光学仪器国家重点实验室浙江大学光电系,杭州浙江310027

出　　处：《光子学报》2004年第10期1207-1209,共3页Acta Photonica Sinica

基　　金：国家自然科学基金资助项目 (10 174 0 6 7)

摘　　要：介绍了一种基于光热光偏转检测技术的原理 ,可以检测金属材料次表面缺陷空间分布的激光热波探测系统 该系统具有结构紧凑 ,调试简便 ,运行稳定 ,测试结果可靠的特点 ,它用半导体激光作泵浦光源和探测光源 ,采用电源调制的方式对泵浦光束进行调制 ,有频率稳定、噪音小的优点 ,同时系统可以用低压直流电源供电 ,为仪器化和便携化研究创造了条件 利用该系统对金属铝片次表面不同深度的凹槽作了检测 。A thermal wave examining system, which is based on the theory of photo-thermal deflection technique and can examine the spatial distribution of subsurface defects of metal material is described. The system has features of compact structure, easy adjusting procedure and stable test result. Two semiconductor lasers are used as pumping and detecting sources in the system. The pump beam is modulated by the power supply modulating method, which made the system have the adventures of more stable frequency and lower noise. The pump beam and the detecting beam can be supplied by low voltage DC supply source made the examining system have the possibility of integrate and portable. A satisfied examining result is got by using this system on an aluminum chip sample which has different deep channel on its subsurface.

关 键 词：光热偏转技术 无损检测 次表面成像 

分 类 号：TB303[一般工业技术—材料科学与工程] TN247[电子电信—物理电子学]