三维形貌测量的扫描相移法研究  

Study on Scan-phase-shifting Profilometry forMeasurement of 3-D Object Shapes

作　　者：徐建强[1] 王蕴栅[2] 司书春[2] 高成勇[2] 云大真[1] 

机构地区：[1]大连理工大学工程力学系,辽宁大连116023 [2]山东大学物理与微电子学院,山东济南250061

出　　处：《光子学报》2004年第10期1210-1213,共4页Acta Photonica Sinica

摘　　要：物体三维形貌测量中常用的光切法的主要优点是易于实现扫描测量大型物体表面 ,缺点是光刀中心位置难以精确确定 ;相移法的主要优点是可以用较宽的光栅提高测量的灵敏度与准确度 ,具有测量速度快和较好的抗静态噪声的能力 ,缺点是当待测范围较大时 ,采集图像的像差较大 ,不利于大型物面的测量 将这两种方法有机地结合起来 ,取长补短 ,提出了一种扫描相移法 实验结果表明 ,这个方法不但适用于长形大物面的形貌检测 ,而且又大大地减少了图像采集系统畸变误差的影响 。In 3-D object shapes measurement, the strong suit of light-Sectioning method(LSM) in common used is easy to accomplish the scan measure of large scale object surface.The shortcoming of LSM is the light- knife center was difficult to be confirmed exactitude. The principal strongpoint of phase-shifting method is enhanced the measure sensitivity and precision with wider grating, phase-shifting method has the capabilities of rapidness measure speed and finer resist static state noise. The disadvantage of the method is having biggish aberration when measured the big area, so it is unfit for measurement the large-scale surface. A novel method is proposed to measure 3-D object shapes based on scan phase-shifting method by combined the strongpoint of above tow methods. The experiment results indicate that the new method can measure the surface shape of large object, and the influence of aberration error caused by image gather system can be decreased greatly, the measurement precision can be enhanced accordingly.

关 键 词：三维形貌测量 扫描相移法 相移法 光切法 

分 类 号：O439[机械工程—光学工程] TN911.73[理学—光学]