新型高灵敏度压电陶瓷多层膜结构加速度传感器  

High-sencitivity of piezoelectric monolithic multilayed accelermoter

作　　者：张望重[1] 李国荣[1] 郑嘹赢[1] 殷庆瑞[1] 

机构地区：[1]中国科学院上海硅酸盐研究所高性能陶瓷和超微结构国家重点实验室,上海200050

出　　处：《功能材料》2004年第5期624-626,共3页Journal of Functional Materials

基　　金：国家高技术研究发展计划(863计划)资助项目(2001AA325031);国家重点基础研究发展计划(973计划)资助项目(2002CB613306)

摘　　要：　采用压电陶瓷粉体厚膜流延成型工艺和陶瓷内电极共烧技术制成了一种圆环状多层膜结构的压电陶瓷片,用它代替以往圆环状单片压电陶瓷片后,其压电加速度的灵敏度大幅度提高。本文对该加速度的性能进行了研究。这种体积小、重量轻、灵敏度高的新型加速度计可望在高新技术领域中获得应用。In this paper, the ringed monolithic multilayered piezoelectric ceramics pallet was fabricated by the tape-casting technology and co-fired with inner electrodes. By substituting the multilayered piezoelectric ceramics pallet to the former single ceramics pallet, the charge sensitivity of the new accelerator improves largely. The charge sensitivity and its temperature, frequency relationship of the new accelerator are also investigated. The new accelerator could be used at the fields in advanced technology such as aviation, spaceflight for its small volume, light weight, and high sensitivity.

关 键 词：流延技术 多层片式结构 压电陶瓷敏感元件 加速度传感器 

分 类 号：O611[理学—无机化学] O782[理学—化学]