激光辐照改变Ta_2O_5陶瓷的介电性能  

Improving Dielectric Properties of Ta_2O_5 Ceramics by Laser Irradiation

作　　者：季凌飞[1] 王伟[1] 于振龙[1] 蒋毅坚[1] 

机构地区：[1]北京工业大学国家产学研激光技术中心,北京100022

出　　处：《光电子．激光》2004年第10期1242-1245,共4页Journal of Optoelectronics·Laser

基　　金：北京市自然科学基金资助项目(2002005)

摘　　要：采用大功率CO2激光辐照技术,进行Ta2O5陶瓷介电性能的改性研究。对辐照前后陶瓷试样的介电性能进行了温度和频率特性的比较,通过X射线衍射(XRD)和扫描电镜(SEM)分析,探讨了其介电性能改变的微观机理。经400～1000W的大功率激光辐照处理后,Ta2O5陶瓷的介电常数提高了近1倍(κ>60),同时保持了良好的热稳定性(TCκ<10-3/℃)。Improving the dielectric properties of Ta2O5 ceramics by CO2 laser irradiation was investigated. The temperature dependence and frequency dependence of the dielectric properties were investigated, respectively. The reason of dielectric properties modification was also discussed by the characterization of X-ray diffraction (XRD) and the fractured surface SEM analysis of samples. The dielectric permittivity of the samples irradiated at the laser power of 400-1000 W can be increased by nearly a factor of two (κ>60), while keep smaller temperature coefficient (TCκ-3/°C).

关 键 词：改变 CO2激光 TC 处理 激光辐照 光辐射 分析 TA2O5 X射线衍射 介电性能 

分 类 号：TN304[电子电信—物理电子学] O484[理学—固体物理]