不同形状台面的AlGaAs湿氮氧化规律研究  

Study on AlGaAs Wet Oxidation of Different Shape Mesa Structures

作　　者：董立闽[1] 郭霞[1] 渠红伟[1] 杜金玉[1] 邹德恕[1] 廉鹏[1] 邓军[1] 徐遵图[1] 沈光地[1] 

机构地区：[1]北京工业大学电子信息与控制工程学院北京市光电子技术实验室,北京100022

出　　处：《光电子．激光》2004年第8期941-945,共5页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(60276033;69889601);国家"863"高技术计划资助项目(2002AA312070);国家"973"计划资助项目(G20000683 02);北京自然科学基金资助项目(4021001)

摘　　要：详细研究了凸形、凹形与条形台面的AlGaAs湿氮氧化规律。对三种形状的台面分别进行氧化长度的观察测试,发现凸形、条形及凹形台面的氧化速率顺次下降,且随氧化时间的加长,差距明显增大。运用氧化动力学方法分析,是由于不同形状台面内的氧化剂浓度及氧化剂扩散速率不同引起;并推导得出台面形状、尺寸与氧化速率的对应关系。所推导的氧化规律模拟曲线与实验数据基本吻合。进一步指出当台尺寸较小时,由于氧化剂在气相传送中也受到了限制,凹形台面氧化速率的实验值与理论值会出现较大偏差。The wet oxidation rule of buried AlGaAs in difform mesa structures had been discussed in details.The difference of oxidation thickness in difform mesa structures was observed in the same experimental condition.The oxidation rate was decreased with the order of convex,stripe and concave mesa,and the difference became larger with the increase of oxidation time.The distinction of oxidant concentration and diffuse rate in difform mesa resulted in the difference of oxidation rate.The relations between the mesa shape and the oxidation rate,the mesa size and the oxidation rate were deduced by the kinetics of thermal oxidation,and the simulated results closely accorded with the experimental results.When the size of concave mesa was very small,the experimental data would deviate from the calculated data for the limitation of the gas transport.

关 键 词：氧化剂浓度 凹形 氧化速率 扩散速率 气相 氧化动力学 模拟 大偏差 推导 形状 

分 类 号：TN915.01[电子电信—通信与信息系统] TQ174.764[电子电信—信息与通信工程]