初探混合物理化学气相沉积法(HPCVD)制备不锈钢衬底MgB_2超导厚膜样品  

SUPERCONDUCTING MgB_2 FILMS FABRICATED ON STAINLESS STEEL SUBSTRATE BY HYBRID PHYSICAL CHEMICAL VAPOR DEPOSITION

作　　者：王新峰[1] 郭荆璞[1] 贾璋[1] 吕莹[1] 朱萌[1] 王晓楠[1] 陈晋平[1] 徐军[1] 冯庆荣[1] 

机构地区：[1]北京大学物理学院,国家人工微结构和介观物理重点实验室,北京100871

出　　处：《低温物理学报》2004年第4期344-349,共6页Low Temperature Physical Letters

基　　金：国家超导研究中心 (BKBRSF G19990 6 4 6 0 2 )资助项目~~

摘　　要：介绍用混合物理化学气相沉积法 (HPCVD)制备的不锈钢衬底MgB2 超导厚膜样品 .该样品的Tc(onset) =38K ,Tc( 0 ) =2 7K .X光衍射图形表明它是 (10 1)方向织构的致密厚膜 .这种膜具有较强的韧性 ,同时和衬底有高度的结合性 .当其被弯曲到约 2 0 0微米半径的弧度时 ,膜面会出现条状裂纹 ,但仍有少部分膜面未被破坏 ,保持完整 。MgB-2 thick film was prepared on the stainless steel substrate using the technique of hybrid physical-chemical vapor deposition (HPCVD). The raw materials were B-2H-6 and Mg ingot. The transition temperature is T-{c(onset)}=38K, and T-{c(0)}=27K (90%～10%). From the X-ray diffraction pattern and SEM images, it is known that the film was dense and highly textured along direction with high tenacity. It remained intact and firmly adhered to the substrate. The crack appeared after further bending to 200μm in curvature. This suggests a high application practical in superconducting industry.

关 键 词：厚膜 衬底 超导 微米 X光衍射 TC 弯曲 物理化学 MGB2 半径 

分 类 号：O511[理学—低温物理]