等离子体诱导碳纳米管到纳米金刚石的相变  

Plasma_induced transformation of carbon nanotubes to nanocrystalline diamond

作　　者：孙立涛[1] 巩金龙[1] 朱志远[1] 朱德彰[1] 何绥霞[1] 王震遐[1] 

机构地区：[1]中国科学院上海应用物理研究所,上海201800

出　　处：《物理学报》2004年第10期3467-3471,共5页Acta Physica Sinica

基　　金：中国科学院知识创新工程重要方向项目 (批准号 :KJCX2_SW_N0 2 );国家自然科学基金 (批准号 :10 3 75 0 85 );上海市纳米专项 (批准号 :0 3 5 2nm0 5 0 )资助的课题~~

摘　　要：采用氢等离子体 ,实现了碳纳米管向金刚石的结构相变 ,并实现了金刚石的高密度成核 ,有效成核密度可达10 1 1 /cm2 以上 ,处于目前金刚石成核密度的最高行列 ,为制备优质的金刚石薄膜提供了保证 .高分辨透射电镜、x射线衍射和拉曼光谱都证实了金刚石的形成 .同时 。Structural phase transformation from multiwalled carbon nanotubes to nanocrystalline diamond by hydrogen plasma post-treatment was carried out. Ultrahigh equivalent diamond nucleation density above 10^(11) nuclei/cm^2 was easily obtained. The diamond formation and growth mechanism was proposed to be the consequence of the formation of sp^3 bonded amorphous carbon clusters. The hydrogen chemisorption on curved graphite network and the energy deposited on the carbon nanotubes by continuous impingement of activated molecular or atomic hydrogen are responsible for the formation of amorphous carbon matrix. The diamond nucleates and grows in the way similar to that of diamond CVD processes on amorphous carbon films. The present method of hydrogen treatment provides a controllable way for the CVD of high quality diamond films.

关 键 词：成核密度 氢等离子体 高分辨透射电镜 拉曼光谱 金刚石薄膜 结构相变 碳纳米管 纳米金刚石 制备 晶粒 

分 类 号：TB383[一般工业技术—材料科学与工程]