激光多普勒效应微纳测量技术的研究  

A Study on Technique of Micro-Nano Measurement Using Laser Doppler Effect

作　　者：杜振辉[1] 武斌[2] 李志刚[1] 谢艳[3] 蒋诚志[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]河北建工学院电气工程系,张家口075024 [3]天津大学机械工程学院,天津300072

出　　处：《纳米技术与精密工程》2004年第3期221-224,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目 (40 2 740 4 6 ;50 2 751 0 8) .

摘　　要：研究MEMS系统中可动构件 (膜、梁、梳、面、弹簧 )在承受压力、弯曲等机械负荷及热负荷下的性能 ,重要途经是测量其在各种条件下的运动量 (振动、位移等 ) .提出了一种MEMS构件微小振动、位移测量系统 ,采用外差法激光多普勒技术 ,通过对信号的频谱分析 ,确定了信号处理单元的适宜频带宽度 .对调相多普勒跟踪信号进行相干解调及频率 /电压转换 ,可以实时地得到被测的速度、位移、加速度、频率等参量 .实现的测量分辨力为 2 0nm .There are a few typical movable elements that usually appear in MEMS: membranes, beams, combs, flats and spiral springs. One of the most important approaches to study the performances of MEMS components under mechanical and thermal loads (pressure, bending, squeezing and stretching) is to measure their movement parameters. A small MEMS component vibration measuring system using heterodyne laser Doppler technology is proposed. The frequency bandwidth is properly determined by analyzing the frequency of Doppler signal. The velocity, displacement, acceleration and frequency to be measured can be acquired in real-time by coherent demodulation and F/V conversion of the phase-modulated Doppler signal. A resolution of 20 nm is rea-lized.

关 键 词：相干解调 MEMS 频带宽度 电压转换 跟踪 信号处理单元 分辨力 构件 实时 位移测量系统 

分 类 号：TG806[金属学及工艺—公差测量技术]