直流辉光和磁控增强放电等离子体的空间分辨发射光谱技术  

Argon Plasma Generated by DC Glow and Magnetron Assisted Discharge: a Study of Spatial Resolved Optical Emission Spectroscopy

作　　者：于红[1] 张家良[1] 任春生[1] 王友年[1] 马腾才[1] 

机构地区：[1]大连理工大学三束材料改性国家重点实验室,大连116023

出　　处：《真空科学与技术学报》2004年第4期255-259,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金 (No .1983 5 0 3 0 )资助项目

摘　　要：光学发射光谱 (OES)方法是等离子体诊断的有力工具之一 ,可以定量地给出等离子体的多种重要参数 ,如等离子体中的物种成分、粒子能态分布、激发温度、粒子相对密度等。本文介绍了一种用于电子回旋共振 (ECR)微波等离子体磁控溅射靶附近的增强放电和直流辉光放电等离子体空间分辨诊断的发射光谱装置。其特点是光学收集系统的位置可以水平精细移动 ,因而可以对放电区域进行空间分辨发射光谱测量。作者利用这套装置对氩气的ECR微波等离子体和直流辉光放电等离子体进行诊断。在ECR微波等离子体的下游区内氩离子谱线的发射强度很弱 ,主要是高激发态原子的辐射。在磁共振增强放电区 ,离子谱线强度有所增加但仍比原子谱线弱 ,类似于直流辉光放电正柱区的光发射特性。A novel experimental technique,called spatial resolved optical emission spectroscopy (OES),has been successfully developed to spatially characterize the argon plasma generated by DC glow discharge and by magnetron assisted,microwave electron-cyclotron-resonance (ECR) discharge.The unique nature of the new technique is that because the position of the optical collector can be horizontally moved with high precision,it is possible to perform spatial resolved optical emission spectroscopy study of the plasma in the discharge zone.The results show that in the downstream area of argon ECR plasma the relative OES intensity,mainly resulting from emission of excited levels of argon atoms,is rather weak,and it increases a little in the magnetron discharge area near the target but is weaker than that of argon atoms,similar to the optical emission of DC glow discharge in the positive column of the cathode sheath.

关 键 词：发射光谱 直流辉光放电 激发态原子 激发温度 类似 行空间 微波等离子体 空间分辨 光发射 电子回旋共振 

分 类 号：TB651[一般工业技术—制冷工程] O536[理学—等离子体物理]