提高硅光探测器量子效率技术与应用  

The technique for enhancing quantum efficiency of Si photodetector and its application

作　　者：文雪冬[1] 刘兴桂 苏伯玖 

机构地区：[1]西南技术物理研究所,成都610041

出　　处：《激光技术》1993年第5期301-302,共2页Laser Technology

摘　　要：本文介绍了提高硅光探测器量子效率的半球形点阵技术。介绍了运用这一技术制作的P-I-N和RAPD硅光探测器。In this paper, the hemispherical grating technique, which is effectively used in enhancing quantum efficiency of Si photodetector, is introduced. By using this technique, PIN and RAPD photodetector are fabricated.

关 键 词：硅光探测器 量子效率 应用 

分 类 号：TN382[电子电信—物理电子学]