光栅微振动测试传感技术的研究  

Study on Transducer Technology of Micro-Vibration Measurement with Grating

作　　者：李淑清[1] 南忠良[1] 陶知非[2] 陈宁[1] 陈晓艳[1] 

机构地区：[1]天津科技大学自动化学院,天津300222 [2]石油地球物理勘探局装备事业部,涿洲072751

出　　处：《纳米技术与精密工程》2004年第2期157-162,共6页Nanotechnology and Precision Engineering

基　　金：国家自科学基金资助项目 (40 1 740 31 )

摘　　要：提出了一种微弱地震波信号新的检波理论和方法 .设计了一种测微振动传感器 ,采用光栅谐振子为敏感元件 ,将地震的机械信号转换成光调制信号———莫尔条纹 ,再用光电器件将其转换成数字化电信号 .采用 80倍细分技术 ,使传感器分辨力达到 12 5nm ;用MATLAB软件对PIC单片机记录的信号进行振动过程重构 .结构中设计了横向限振片和光栅调节器 ,对光栅间隙、光栅间纵横向夹角进行调节 ,有效地限制了光栅间隙及角度的变化产生的误差 .同时也校正了光栅的累积误差 .有效地抑制了横向振动 ,提高了系统精度 ,同时可降低对该系统的横向限振要求 ,有利于结构设计 .由于该传感器直接将地震的机械信号以脉冲数字信号输出 ,避免了器件精度不同对传感器输出数据质量的影响 ,简化了组装工艺 .重点介绍了光栅数字地震检波器的结构设计、理论分析、辨向细分技术等 .A new theory and method of detection for signal of weak seismic wave is presented. As the sensory unit, the vibrator of grating sensor is designed to measure micro-vibration, and transform the vibration of ground into light modulating signal-Moiré fringe, and then, change it into digital signal by photoelectric elements. Using 80 times subdivision technology, resolving power is enhanced to 125 nm;by use of MATLAB,the vibration process is reconstruct according to the recorded signal of PIC. In the structure, two springs limiting lateral vibration and two grating adjusters are designed to effectively reducing errors coming from grating gap and angle, by which the gating gap and angle can be adjusted. And the accumulative error is corrected meanwhile. The lateral vibration is effectively restrained; the system precision is increased, and demand to lateral vibration limiting is brought down, all of these are availed to configuration design. Because of the direct digital pulses output of grating sensor, the influence of different precisions of the devices to data quality is avoided, and the assemblage technology is simplified. Configuration design, theory analysis, directions distinguish and subdivision technology are presented as emphasis. Test data and conclusion is attached at last.

关 键 词：光栅微振动测试传感技术 微弱地震波信号检测 莫尔条纹 横向振动 

分 类 号：P631.43[天文地球—地质矿产勘探]