PIII方法制备的TiN膜的性能  被引量:6

Properties of TiN Films Prepared by PIII

在线阅读下载全文

作  者:王钧石[1] 

机构地区:[1]西南交通大学材料科学与工程学院,四川成都610031

出  处:《机械工程材料》2004年第11期19-21,共3页Materials For Mechanical Engineering

基  金:中国科学院上海微系统与信息技术研究所离子束重点实验室应用基础研究基金资助项目(100027)

摘  要:用一种新型的等离子体浸没式离子注入技术(PIII),在Cr12MoV钢基体上制备了TiN膜,经XPS分析发现,膜中的组织为TiN、TiO2和Ti2O3。对有与无TiN膜的Cr12MoV钢试样进行对比,测定了维氏硬度,耐磨性以及磨痕。结果表明:TiN膜具有高的硬度和优良的抗摩擦性能。TiN films were prepared by a new plasma immersion ion implantation-ion beam assisted deposition(PIII-IBAD) on Cr12MoV steel. It was found by X-ray photoelectron spectroscopy(XPS) analysis that the TiN films were composed of TiN, TiO_2 and Ti_2O_3. The hardness and wearing resistance of the TiN films were determined by Vickers microhardness experiment and sliding friction experiment, and the wearing traces on the specimens after sliding friction experiment were analyzed by scanning electron microscopy (SEM) in comparing with untreated specimens of Cr12MoV steel. The results of the experiments indicate that the TiN films have very high hardness and fine wearing resistance.

关 键 词:等离子体浸没式离子注入 TIN膜 显微硬度 摩擦性能 

分 类 号:TG156.8[金属学及工艺—热处理]

 

参考文献:

正在载入数据...

 

二级参考文献:

正在载入数据...

 

耦合文献:

正在载入数据...

 

引证文献:

正在载入数据...

 

二级引证文献:

正在载入数据...

 

同被引文献:

正在载入数据...

 

相关期刊文献:

正在载入数据...

相关的主题
相关的作者对象
相关的机构对象