TeO_(x) Thin Films for Write-Once Optical Recording Media  

作　　者：Qinghui LI, Donghong GU and Fuxi GANResearch Laboratory for High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China 

出　　处：《Journal of Materials Science & Technology》2004年第6期678-680,共3页材料科学技术（英文版）

基　　金：.This work was supported by the Key National Natural Science Foundation of China(Grant No.59832060).

摘　　要：TeO_x thin films were prepared by vacuum evaporation of TeO_2 powder. Structural characteristic and surface mor-phology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the films represented a two component system comprising Te particies dispersed in an amorphous TeO2 matrix. The dispersed Te particies were in a crystalline state. The TeOx films showed a finely granular structure and a rough surface. Results of the statie recording test showed that the TeO_x films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeO_x films were suitable for using as a blue-green wavelength high density optical storage medium.TeO_x thin films were prepared by vacuum evaporation of TeO_2 powder. Structural characteristic and surface mor-phology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the films represented a two component system comprising Te particies dispersed in an amorphous TeO2 matrix. The dispersed Te particies were in a crystalline state. The TeOx films showed a finely granular structure and a rough surface. Results of the statie recording test showed that the TeO_x films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeO_x films were suitable for using as a blue-green wavelength high density optical storage medium.

关 键 词：TeO_x thin film Statie recording test Dynamic test High density optical storage 

分 类 号：O614[理学—无机化学]