表面等离子共振金/钯复合膜氢敏传感器  被引量:12

Surface plasmon resonance hydrogen sensor by using a Au-Pd thin film transducing layer

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作  者:胡建东[1] 王晓萍[1] 文泓桥[1] 

机构地区:[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出  处:《光学技术》2004年第6期643-645,651,共4页Optical Technique

摘  要:提出了一种新颖的钯(Pd)/金(Au)复合膜表面等离子共振氢敏结构,与单一Pd膜氢敏传感器相比,具有可靠性好、灵敏度高和响应度大等特点。利用表面等离子共振理论建立了Au/Pd复合膜氢敏传感器的数学模型,并对Au/Pd复合膜氢敏传感器的灵敏度进行了数值模拟。数值模拟结果表明:基于Au(2nm)/Pd(20nm)复合膜氢敏传感器所获得的最佳灵敏度比单一Pd(20nm)膜氢敏传感器提高了49 4%。A novel hydrogen sensor coated a combined Au and Pd thin film is investigated. Unlike a singular Pd thin film sensor, the new structure is high durable, high response value and high sensitive. A corresponding mathematic model based on surface plasmon resonance(SPR) hydrogen sensors is established. The sensitivity of SPR hydrogen sensor is modeled. The simulation result shows that the optimal layer configuration for SPR hydrogen sensors should be Au (2nm)/Pd (20nm) for achieving best performance. Compared to a traditional singular Pd hydrogen sensor, the sensitivity of the new hydrogen sensor is increased by 49.4%.

关 键 词:表面等离子共振 氢敏感 Au/Pd复合膜 

分 类 号:O484[理学—固体物理]

 

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