溅射Ni16Cr2.5Al微晶涂层及其氧化行为  

An Investigation of Deposition Structure of Ni16Cr2.5Al Microcrystalline Coatings and its Oxidation Behavior

作　　者：曹硕[1] 邱巍[1] 

机构地区：[1]辽宁大学物理系,辽宁沈阳110036

出　　处：《辽宁大学学报（自然科学版）》2004年第4期371-374,共4页Journal of Liaoning University：Natural Sciences Edition

摘　　要：NiCrAl是NiCrAlY型包覆涂层的主要成分,对NiCrAl涂层的沉积形态及其氧化行为的研究具有重要科学意义.磁控溅射在不锈钢Fe18Cr9Ni0.1Ti基体上制备出Ni16Cr2.5Al微晶涂层(基体分倾斜45 和竖直90 两种方式悬挂),使用SEM/EDAX,X ray,对Ni16Cr2.5Al微晶涂层及其氧化膜进行了分析,以探索高温合金用涂层形成及其氧化膜形成机制.NiCrAl ternary alloys form the base composition of NiCrAlY type overlay coatings, therefore, an investigation of the deposition structure and oxidation behavior of these alloys is of great scientific interest. Deposition Ni16Cr2.5Al microcrystalline coatings on Fe18Cr9Ni0.1Ti stainless steel was carried in a planar magnetron sputtering apparatus(the substrate was suspended in 45  and 90  angle). The as sputtered coatings and their oxidation films were analyzed using XRD,SEM/EDAX. In the present study, an investigation had been undertaken into deposition structure of microcrystalline coatings and oxidation behavior on their oxide scale.

关 键 词：溅射 微晶 NICRAL涂层 氧化膜 

分 类 号：O522[理学—高压高温物理]