多孔二氧化钛涂层的表面形貌  

Surface morphology of porous titania coatings

作　　者：唐光昕[1] 张人佶[1] 颜永年[1] 

机构地区：[1]清华大学机械工程系,北京100084

出　　处：《清华大学学报（自然科学版）》2004年第11期1445-1447,共3页Journal of Tsinghua University(Science and Technology)

摘　　要：为了研究微弧氧化工艺参数对涂层表面形貌的影响以控制表面形貌,用扫描电镜(SEM)和原子力显微镜(AFM)观察了复合氧化法制备的二氧化钛涂层表面形貌,用X射线衍射(XRD)分析了涂层的相结构。SEM观察结果表明,涂层为多孔凹凸不平的表面。AFM观察结果表明,二氧化钛均由nm级颗粒堆垛而成。XRD分析表明,二氧化钛涂层的晶相为锐钛矿、金红石和单质钛。通过对表面粗糙度的计算可知,微弧氧化时间减少可使表面粗糙度降低,涂层具有极大的表面改性潜力。The surface morphology of titania coatings prepared by using a composite oxidation method was investigated by using a scanning electrical microscope SEM and an atom force microscope AFM to control the surface morphology of the coatings. X ray diffraction spectra XRD were employed to determine the phase configurations of the coatings. The results show that the coatings all have uneven porous surfaces that are grain-packed under AFM nm degree in appearance. The phases in the titania coatings are anatase, rutile, and titanium. The roughness of the coatings decreases with decreasing working time of micro-arc oxidation. The coatings provide great potential for useful surface modification in a variety of fields.

关 键 词：表面形貌 涂层 二氧化钛 原子力显微镜(AFM) 

分 类 号：O485[理学—固体物理]