薄膜镀层的XRD分析  

X-ray diffraction analyzing of thin cladding material

作　　者：黄清明[1] 俞建长[2] 吴万国[1] 

机构地区：[1]福州大学测试中心,福建福州350002 [2]福州大学材料科学与工程学院,福建福州350002

出　　处：《福州大学学报（自然科学版）》2004年第6期773-775,共3页Journal of Fuzhou University(Natural Science Edition)

摘　　要：利用X射线多晶衍射和计算机模拟的方法对薄膜镀层的物相成分、晶粒度大小、膜厚度、粗糙度、膜密度、吸收系数、折射因子进行测试分析,分析结果表明采用此方法对薄膜进行分析准确度高,速度快.By using X ray polycrystalline diffraction and method of computer simulation analyzing the phase components of thin film, grain size, thickness, roughness, density, coefficient of absorbing and refractive index were analyzed. The results indicate that this method of the film analyzing is good accuracy and fast.

关 键 词：X射线衍射 薄膜 分析 

分 类 号：O722[理学—晶体学]