四极质谱仪在光阴极转移系统中的应用  

Application of quadrupole mass-spectrometer in transfer system for manufacturing PC

作　　者：赵宝升[1] 黄林涛[1] 

机构地区：[1]中国科学院西安光学精密机械研究所,陕西西安710068

出　　处：《真空》2004年第6期43-45,共3页Vacuum

摘　　要：介绍了四极质谱仪在光阴极转移系统中的应用。分别论述了四极质谱仪对光阴极转移系统的检漏原理与方法,并对系统内光阴极有害的主要残气成分进行了分析。Application of quadrupole mass-spectrometer in the transfer system for photocathode manufacturing(PC) is introduced. The leak-hunting principle and methods of quadrupole mass-spectrometer are discussed with the main composition of residual gases harmful to photocathode in the system determined.

关 键 词：光阴极 转移系统 四极质谱仪 检漏 

分 类 号：TB774.3[一般工业技术—真空技术] TN1[电子电信—物理电子学]