SnO_2光透射率气敏薄膜的制备和研究  

Preparation and Study of Transmittance Gas Sensitive SnO_2 Thin Film

作　　者：边志华[1] 郭竹远[2] 刘瑞丽[3] 吴东[3] 

机构地区：[1]太原理工大学图书馆,山西太原030024 [2]太原理工大学理学院,山西太原030024 [3]中国科学院煤炭化学研究所,山西太原030001

出　　处：《太原理工大学学报》2004年第6期684-686,共3页Journal of Taiyuan University of Technology

基　　金：山西省自然科学基金资助项目(20021053)

摘　　要：采用溶胶 凝胶技术,利用旋转涂膜法制备二氧化锡薄膜。结果发现,常温下在含有CO的气氛中光通过薄膜的透射率变大,对CO有较高的灵敏度。并对制备过程中出现的实验现象、制备机理及薄膜的结构和特性进行了分析和研究。We prepared the suspension of SnO_2 by the sol-gel process,then it was prepared into thin film by spin-coat process. At the room temperature, in the atmosphere containing CO, light transmittance through the film becomes bigger, showing that by the higher sensitivity to CO. The experimental circumstances, the preparing mechanism, and the structure and characteristics of the thin film in the process are studied.

关 键 词：二氧化锡 气敏 薄膜 光透射率 溶胶-凝胶法 

分 类 号：O484.4[理学—固体物理]