常压介质阻挡放电等离子体发射光谱诊断及其在材料表面改性中的应用  

Spectral Diagnosis of Dielectric Barrier Plasma Discharge at Atmospheric Pressure and Its Application to Surface Modification of Materials

作　　者：唐晓亮[1] 冯贤平[1] 黎志光[1] 闫永辉[1] 邱高[1] 

机构地区：[1]东华大学物理系,上海200051

出　　处：《光谱学与光谱分析》2004年第11期1437-1440,共4页Spectroscopy and Spectral Analysis

基　　金：上海市科技发展基金(0252nm110);上海市教委"曙光计划"项目(02SG28);教育部科学技术研究重点项目(03077);东华大学资助项目

摘　　要：使用介质阻挡放电光谱诊断装置,分析了常压等离子体放电电流与放电间隙的变化关系,提出了“放电临界间隙”的概念,记录和比较了空气和氩气常压介质阻挡放电等离子体发射光谱,并运用同一元素谱线的相对强度来诊断电子温度等物理参量,以达到对材料表面改性过程的实时监控。工作的结果对常压介质阻挡放电及其在材料改性中的应用具有重要的意义。The spectral lines of air and argon plasma emission at atmospheric pressure were recorded and analyzed. Plasma parameters such as discharge current, discharge gap and electron temperature were measured. The purpose of the study is to control the process of materials' surface modification promptly. The experimental results indicate that a critical discharge gap is an important parameter to improve the quality of materials' surface modification, and spectral diagnosis has been proved to be a workable method by choosing a suitable discharge gap.

关 键 词：介质阻挡放电 材料表面改性 电子温度 变化关系 临界 相对强度 常压 诊断 等离子体发射光谱 用具 

分 类 号：O461[理学—电子物理学] O53[理学—物理]