采用粉末溅射的SnO_2/CeO_2薄膜气敏材料及元件  

SnO_2/CeO_2 thin film gas sensitive material and sensor prepared by powder sputtering

作　　者：邢建平[1] 蔡成森[1] 李娟[1] 孟令国[1] 李秀宇[1] 高红[2] 

机构地区：[1]山东大学信息科学与工程学院,济南250100 [2]山东冶金技术学院,济南250000

出　　处：《功能材料与器件学报》2004年第4期475-478,共4页Journal of Functional Materials and Devices

摘　　要：为改善气敏元件的性能,提高稳定性,采用粉末反溅研制了SnO2/CeO2乙醇敏感材料,结果表明:灵敏度在CeO2掺杂范围4%-32%、膜厚100-180nm时较佳,特征时间τ与膜厚l遵循τ∝l2规律,研制出乙醇灵敏度20-80、特征时间<15s的微型平面旁热式SnO2气敏元件;元件灵敏度测试存在一个4.5-10.5V相对稳定的测试电压区间,且在湿度影响下显著降低。Anti -powder sputter method was adopted to develop SnO 2 /CeO 2 alcohol gas sensitive material.Experiment results show t hat the new technique can improve the stability of the gas sensitive thin film.The optimum doping range a nd the sensitivity thin film' s thickness are determined to be 4%-32%and 100-180nm,respectively.The characteristic time τchanges with thin film thickness l following the rule ofτ∝l 2 .By using the SnO 2 /CeO 2 thin film,a new alcohol gas microchi p sensor with side -heater was developed,which has the gas sensitivity between 20to 80and the characteristics time less than 15s.The gas sensor has a relatively stable testing voltage betw een 4.5to 10.5V.Moreover,the sensitivity of the gas sensor is s ignificantly reduced by the existen ce of humidity.

关 键 词：反溅 薄膜 气敏元件 

分 类 号：TN304.92[电子电信—物理电子学]