Hg_(1-x)Cd_xTe光伏探测器的钝化研究  

STUDY ON THE PASSIVATION OF Hg_(1-x)Cd_xTe PHOTOVOLTAIC DETECTORS

作　　者：孙涛[1] 李言谨[1] 王庆学[1] 陈兴国[1] 胡晓宁[1] 何力[1] 

机构地区：[1]中国科学院上海技术物理所功能材料器件中心,上海200083

出　　处：《红外与毫米波学报》2004年第6期469-472,共4页Journal of Infrared and Millimeter Waves

基　　金：中国科学院知识创新工程资助项目(KGCX2SWJG06)

摘　　要：用倒易二维点阵对HgCdTe光伏探测器钝化及其热处理行为进行了研究,发现测射沉积的钝化膜会引起HgCdTe的晶面弯曲,严重的会出现晶面扭曲和mosaic结构,而钝化后的热处理能改善MCT晶体的完整性.在不同的钝化介质层钝化MCT的研究中发现,ZnS钝化层在高温下并不稳定,而CdTe钝化层却能保持较高的耐温性能.The epitaxial layers of HgCdTe passivated by CdTe and ZnS were investigated with high-resolution reciprocal space mapping of X-ray diffraction. It was found that the wafers of HgCdTe were bended and mosaic structures were also observed because of the sputtered passivation layers, and the bended wafers and mosaic structures could be recoverred by suitable heating treatment. The experimental results also show that ZnS lacks stability in the high temperature as passivation layer, but CdTe shows excellent performance of high-temperature resistance.

关 键 词：光伏探测器 钝化层 介质层 MCT 晶面 二维 点阵 E光 晶体 发现 

分 类 号：TN215[电子电信—物理电子学] O436.3[机械工程—光学工程]