Si基SiGe光波导开关的研究现状与最新进展  

Recent Progress of Si-based SiGe Optical Waveguide Switches

作　　者：李静[1] 赵玉周[1] 林旭彬[1] 胡巧燕[1] 李章健[1] 陈志文[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室,广东广州510275

出　　处：《半导体光电》2004年第6期417-422,425,共7页Semiconductor Optoelectronics

基　　金：教育部科学技术研究重点项目 (1 0 41 44) ;广东省科技计划项目 (2 0 0 3A1 0 60 2 0 1 ) ;教育部留学回国人员科研启动基金资助项目 (教外司留 [2 0 0 3 ]40 6) .

摘　　要：　随着光纤通信技术的迅猛发展,作为光交叉连接和光分插复用核心器件的光开关的作用日益突出。其中Si基光波导开关由于其成本低、可靠性高、器件制作工艺成熟等诸多优点而备受重视。综述了目前Si基光波导开关,特别是SiGe材料光波导开关的研究现状和进展。With rapid development of fiber-optic communications, the importance of optical switches is becoming increasingly prominent because they serve as one kind of key components for optical cross connect and optical add-drop multiplexer. Especially, Si-based optical waveguide switches are more promising owing to low-cost, high reliability, and very mature fabrication technology. In this paper, the recent progresses of Si-based SiGe optical waveguide switches have been discussed and analyzed.

关 键 词：光开关 SIGE 光波导 等离子体色散效应 

分 类 号：TN252[电子电信—物理电子学]