永磁流变抛光纳米精度非球面技术研究  

Magnetorheological finishing for aspheric surface with nanometer accuracy

作　　者：程灏波[1] 王英伟[2] 冯之敬[1] 

机构地区：[1]清华大学精仪系,北京100084 [2]长春理工大学材料系,长春130022

出　　处：《光学技术》2005年第1期52-54,共3页Optical Technique

基　　金：国家自然科学基金项目(50175062);国家博士后青年基金(2003034142)

摘　　要：利用永磁流变抛光技术制造高精度光学元件是一项极具前景的超精密制造技术。对一台五轴联动磁流变数控抛光系统的结构特点、功能特色及关键部件的设计进行了阐述。在此基础上,结合装置开展基础试验,对磁流变抛光过程中的主要控制参量如抛光轮下压量、抛光轮速度等对材料去除特性的影响进行了研究。开展了磁流变抛光对提高工件(K9玻璃)表面粗糙度效果的抛光试验,结果证明该套系统具有良好的磁流变抛光特性,抛光23min后工件表面粗糙度降低到0 6739nm。Magnetorheological finishing (MRF) for manufacturing high accuracy optical aspheric components is a promising technique in the field of super-precision fabricating technology. A novel aspheric manufacturing system equipped with MRF function is introduced, which incorporates a host of features and has unprecedented fabricating versatilities. It is a five coordinates, self-rotating wheel polishing machine, the pre-polishing and fine polishing processes can be done utilized the system only need to adjust different coefficients. The main parameters such as relative pressure, velocity between the polishing wheel and the workpiece are analyzed experimentally. The practicability of the home made MRF system is verified for polishing a mirror made from K9 glass. The surface roughness of the experimenting workpiece has decreased to 0.6739 nm Ra after polishing for 23 min.

关 键 词：磁流变抛光 非球面 抛光轮 磁偶极子 

分 类 号：TG580.6[金属学及工艺—金属切削加工及机床]