SnO_2光透射率气敏薄膜的制备  

Preparation and Study of Transmittance Gas Sensitive SnO_2 Thin Film

作　　者：郭竹远[1] 边志华[1] 

机构地区：[1]太原理工大学,山西太原030024

出　　处：《电子工艺技术》2005年第1期32-34,共3页Electronics Process Technology

基　　金：山西省自然资金资助项目;编号为20021053。

摘　　要：采用溶胶-凝胶技术,利用旋转涂膜法制备非晶态二氧化锡薄膜,常温下在含有CO的气氛中光通过薄膜的透射率变大,对CO有较高的灵敏度。对制备过程中出现的实验现象、制备机理及薄膜的结构和特性进行了研究。Prepare the suspension of SnO2 by the sol-gel process,then it was prepared into thin film by spin-coat process.At the room temperature,in the atmosphere containing CO,light transmittance through the film becomes bigger,showing the higher sensitivity to CO.The experimental circumstances, the preparing mechanism, and the structure and characteristics of the thin film in the process are studied.

关 键 词：二氧化锡 气敏 薄膜 光透射率 溶胶-凝胶法 

分 类 号：TB43[一般工业技术]