采用宽带光源的双光束干涉中零光程差位置测量研究  

Study on Measurement Method for Position with Zero Light Path Difference of Two Beams of Wide Band Light Source

作　　者：孙杰[1] 刘铁根[1] 张以谟[1] 江俊峰[1] 

机构地区：[1]天津大学现代光学仪器研究所 光电子信息技术科学教育部重点实验室,天津300072

出　　处：《仪器仪表学报》2005年第1期8-12,共5页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金项目 (60 0 72 0 2 3 )资助

摘　　要：提出了一种可以快速实现采用宽带光源的双光束干涉中零光程差位置测量的方法。在测量中 ,以双光束干涉条纹间距的四分之一大小为采样间隔 ,以相邻的四个采样值为一组进行相应的干涉条纹调制度计算 ,以干涉条纹调制度的最大值位置作为零光程差位置。还对光电测量系统中的机械与光电转换精度、采样点位置、采样点密度、双光束光强比、光源相干长度等多方面对测量精度的影响进行了定量分析。The method for measuring the position with zero light path difference of two beams of wide band light is given. Under the condition of the one fourth of the, fringes period length as the sampling step and the four data on group, the modulation of fringes is calculated. The position of maximum modulation of fringes is defined as the position with zero light path difference here. The effects to the results of the machinery precision, the transform precision in the optoelectronic measurement system, the position of sampling, the density of sampling, the intensity ratio of two beams and the interfering length of light source are calculated also.

关 键 词：双光束干涉 光程差 干涉条纹 条纹间距 相干长度 最大值 光强 宽带光源 光电测量系统 调制度 

分 类 号：TH744[机械工程—光学工程] O436.1[机械工程—仪器科学与技术]