可旁向测量的共焦式激光测头  

A Confocal Laser Probe for Lateral Measurement

作　　者：李智[1] 樊玉铭[1] 

机构地区：[1]天津大学国家精密测试技术与仪器重点实验室,天津300072

出　　处：《应用激光》2004年第6期402-404,共3页Applied Laser

基　　金：国家自然科学基金项目 (5 0 0 75 0 6 4 )

摘　　要：本文在研究了共焦式测量原理的基础上 ,研制出一种含参考光路的可旁向测量的共焦式新型激光测头。这种测头舍弃了共焦式测头中的微型位移传感器 ,简化了系统结构 ,降低了成本。文中论述了其测量原理及结构 ,给出了测量系统的动态特性的实验结果。结果表明激光测头的测量分辨力为 0 .2 μm ,动态特性为 336点 /秒 ,测量范围为± 0 .1mm。Based on the study of the optical confocal probe, a new type of confocal laser probe which has an auxiliary arm is developed. The very small and high accurate sensor which is indispensable in the optical confocal probe is not used any more in this new probe which is much simpler and cheaper. The working principle and system structure are given in this study. Detailed and systematic experiments were carried out. A standard deviation of 0.2um in measurement uncertainty, (0.1mm measuring range and sampling rate of 336 points per second have been achieved.

关 键 词：光测 共焦 激光 光路 分辨力 微型 系统结构 实验结果 降低 研究 

分 类 号：TN957.52[电子电信—信号与信息处理] R775.1[电子电信—信息与通信工程]