大型非球面主镜细磨中的一种在线检测技术  

An on-line measuring technique for lapping large aspherical mirror

作　　者：万勇建[1] 范斌[1] 袁家虎[1] 杨力[1] 郑耀[1] 曾志革[1] 

机构地区：[1]中国科学院光电技术研究所

出　　处：《光电工程》2005年第1期1-4,共4页Opto-Electronic Engineering

基　　金：中国科学院光电技术研究所前沿科研基金项目(CK0204)

摘　　要：提出了一种在大型非球面镜细磨加工阶段使用的低成本在线检测技术。该技术将高精度测长装置集成在普通数控加工机床上,构成在线测量系统。通过测量工件面形上的各点空间坐标,并将测量数据经过坐标变换、误差补偿等处理,实现在线面形测量。与 Leize 三坐标测量机对比测量同一个面形,二者的测量结果误差 P-V为 4.0ìm,RMS 为 0.8ìm。在普通数控细磨机床上实现了在线面形测量且测量精度优于 5ìm。利用此系统,实现了细磨加工过程的镜面面形在线检测。A low-cost on-line measuring technique used in fine grinding phase of large aspherical mirror is proposed. The high-precision length-measuring apparatus is integrated into a common digital-controlled machine tool which forms an on-line measuring system. The on-line measurement is carried out through measuring various spatial point on the profile of a workpiece, and transforming the measured data and error compensation. Compared with Leize three-dimension measuring machine for measuring the same surface shape, the error P-V between two results is 4.0 μm and RMS is 0.8 μm. The on-line surface shape measurement is carried out on a common digital-controlled lapping machine tool and the measuring accuracy is better than 5 μm.

关 键 词：在线检测 细磨 非球面镜 数控机床 

分 类 号：TQ171.6[化学工程—玻璃工业]