多层薄膜气敏光学特性  

Gas-sensing optical property of multi-layer thin film

作　　者：陈凯[1] 吴文鹏[1] 郑顺镟[1] 

机构地区：[1]中山大学物理系,广州510275

出　　处：《中山大学研究生学刊（自然科学与医学版）》2000年第2期10-17,共8页Journal of the Graduates Sun YAT-SEN University(Natural Sciences.Medicine)

摘　　要：本文介绍了用S—G法制备了ZnO/TiO_2多层薄膜的方法,并研究了其在几种还原性气体中的气敏透射光谱,发现其对氨气具有优良的选择性,且其光学透过率在一定浓度范围内随氨蒸汽浓度增加而显著地单调上升,敏感波段扩展到整个可见光区域。这是一种有实用价值的气敏光纤传感材料。本文亦讨论了该多层薄膜的气敏光学机理和高选择性的机理。In this paper, we introduce the preparation of ZnO/TiO_2 multi-layer-film by S-G method, and study its gas-sensing optical property. The fdm shows a high selectivity to ammonia, and its light-transmittancy increases monotonously considerably as the gas concentration is increased. The sensitive wavelength range extends to full visible spectrum. This material is of great practical value for gas-sensing fiber sensor. The gas-sensing mechanism and high selectivity mechanism are also discussed.

关 键 词：气敏 多层薄膜 可见光区 单调 光学透过率 光学特性 透射光谱 发现 增加 敏感 

分 类 号：O484[理学—固体物理]