PZT压电陶瓷滤波器的烧结工艺研究  

Research on the sintering technology of the PZT piezoelectric ceramic filter

作　　者：毛剑波[1] 

机构地区：[1]合肥工业大学理学院,安徽合肥230009

出　　处：《合肥工业大学学报（自然科学版）》2005年第2期135-137,141,共4页Journal of Hefei University of Technology：Natural Science

摘　　要：结合理论知识和实际生产经验 ,对 6.5 MHz压电陶瓷滤波器的烧结工艺进行了研究。优化了升温速率和保温时间这 2个重要的工艺控制参数 ,降低了陶瓷的气孔率 ,提高了陶瓷的机械品质因数 Qm。在预烧工艺中采用了间歇法和连续法相结合的方式 ,提高了陶瓷的致密度 ,在烧成工序中增加了预烘操作 ,大大降低了烧成后的碎片率。对工艺中容易出现的其它问题进行了分析和总结 ,并提出了切实可行的改进方法 。The sintering technology of the 6.5 MHz piezoelectric ceramic filter is investigated in this paper. Two important technological parameters—the heating rate and the holding time were optimized,and then the ceramic porosity decreased while the mechanical quality factor Q m was improved. In order to increase ceramic density,the combination of continuous and batch heating was applied in the pre-sintering technology. The pre-baking in the sintering process decreased the percentage of ceramic fragments. Some other problems are also discussed and practical methods presented. As a result,the rate of qualified products is increased, and the performance of the filter products improved.

关 键 词：压电陶瓷 滤波器 烧结工艺 

分 类 号：TM282[一般工业技术—材料科学与工程]