高频片式电感用堇青石陶瓷材料的低温烧结和性能  

Sintering Mechanism and Properties of Cordierite Ceramics Used for High Frequency Chip Inductors

作　　者：王少洪[1] 周和平[1] 陈克新[1] 

机构地区：[1]清华大学,北京100084

出　　处：《稀有金属材料与工程》2005年第2期325-328,共4页Rare Metal Materials and Engineering

基　　金：中国国家自然科学基金资助项目(59995523)

摘　　要：用溶胶-凝胶(Sol-Gel)法制备了低介低烧堇青石陶瓷材料。用 X 射线衍射、热分析、扫描电镜等方法研究了该材料的低温烧结行为、析晶过程、烧结性能等。结果表明,该类材料能够在 900℃下低温烧结,其烧结致密过程主要在750℃~900℃之间进行。烧结体的微观结构主要由占 85%(按体积)、大小为 50 nm^150 nm 的 α 堇青石、少量玻璃相和气孔组成。该材料具有良好的介电性能(ε≤5,tgδ≤0.001;1 GHz),能够和银等电极低温共烧,是应用于高频片式电感等电子元器件以及高频陶瓷封装的理想介质材料。Cordierite ceramics with low dielectric constant and loss were developed. Many methods such as XRD, SEM, BET and DTA were used to study its sintering behavior, crystalline and dielectric properties. The results showed that the material could be sintered at low temperature 900degreesC, and its densification mainly occurred during temperature range of 750degreesC-900degreesC. The microstructure of the material composed of 90% volume of alpha cordierite, small amount of glass phases and pores guaranteed its low dielectric constant (4.45) and low dielectric loss (0.001) at high frequency. It is a promising material for the high frequency chip inductors and other electronic parts and high frequency package.

关 键 词：堇青石 低温烧结 介电性能 

分 类 号：TM28[一般工业技术—材料科学与工程]