射频等离子体辅助化学气相沉积Ti-B-N薄膜的结构与性能  

Structure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor depostion

作　　者：马胜利[1] 马青松[1] 牛新平[1] 徐可为[1] P Karvankova S Veprek 

机构地区：[1]西安交通大学金属材料强度国家重点实验室,西安710049 [2]慕尼黑工业大学无机材料化学研究所,慕尼黑d85747

出　　处：《中国有色金属学报》2004年第12期1985-1989,共5页The Chinese Journal of Nonferrous Metals

基　　金：国家自然科学基金资助项目 ( 5 0 2 710 5 3 ;5 0 3 710 67) ;国家自然科学基金委重大国际合作项目;欧盟第五框架计划资助项目(GRD2 0 0 14 0 419)

摘　　要：研究了射频等离子体辅助化学气相沉积获得的Ti B N薄膜的微观组织结构和力学性能。结果表明 :B的加入使Ti B N薄膜中出现TiN纳米晶、BN非晶和TiB2 非晶 (nc TiN/a BN/a TiB2 )的复相结构。Ti B N薄膜组织致密 ,晶粒细小 ,薄膜硬度显著提高。用球盘式磨损实验考察了薄膜的摩擦学特性。与TiN相比 ,Ti B N薄膜抗磨损性能有显著提高 ,磨损机制为微观切削与疲劳磨损共同作用 。The microstructure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor deposition (rf-PCVD) were investigated. The coatings were characterized by energy dispersive X-ray analysis, X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy and optical microscopy. Pin-on-disk tribometer and microscopic hardness tester were used to evaluate the mechanical properties of the coatings. The results show that the structure of the coatings is nanocomposite, where nanocrystalline TiN is embedded in the amorphous matrix of BN and TiB_2. The micro-hardness of Ti-B-N coatings is much higher than that of TiN coatings. The wear resistance of Ti-B-N coatings with a certain addition of boron is remarkably increased, which is caused by the change of friction mechanism of the coatings, although its friction coefficient is a little higher than that of TiN.

关 键 词：射频等离子体辅助化学气相沿积 Ti-B-N薄膜 硬度 耐磨性 

分 类 号：TG174.44[金属学及工艺—金属表面处理]