现代超精密加工技术的概况及应用  

General situation and application of ultraprecise machining technique

作　　者：周志斌[1] 肖沙里[1] 周宴[1] 汪科[1] 

机构地区：[1]重庆大学光电工程学院,重庆400044

出　　处：《现代制造工程》2005年第1期121-123,共3页Modern Manufacturing Engineering

摘　　要：对现代超精密加工技术的发展现状、地位以及在相关领域的应用进行了论述。并对超精密加工设备以及误差补 偿技术方面也作了阐述。Discussed the development,status and application in the correlative field of the modern ultraprecise machining technique under summing up a mass of domestic and foreign data.It has also discussed the machining mechanics and the possible machining equipments and the error compensation technique about the ultraprecise machining technique.

关 键 词：超精密加工 精度 机床 纳米 

分 类 号：TH16[机械工程—机械制造及自动化] TG66[金属学及工艺—金属切削加工及机床]