激光光热偏转成象法无损检测光学薄膜的激光损伤  

Non Destructive Testing of Laser Induced Damage in Optical Thin Films by Laser Photothermal Deflection Image

作　　者：谈恒英[1] 刘鹏程[1] 施柏煊[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,杭州310027

出　　处：《光子学报》2005年第1期158-160,共3页Acta Photonica Sinica

基　　金：国家自然科学基金 (批准号 10 174 0 6 7)资助项目

摘　　要：介绍了应用激光光热偏转成象法无损检测光学薄膜激光损伤的基本原理 ,由此建立了实验检测装置 ,对光学薄膜表面的激光损伤进行了扫描检测 ,并以直观的灰度象显示 实验结果证明了激光光热偏转成象法检测光学薄膜激光损伤具有直观、有效。The principle testing laser induced damage of optical thin films by laser photothermal deflection method (PTDM) and corresponding experimental testing set up are described. The laser induced damage on surface of optical thin films is tested by scanning surface using the set up. Grey image coded by tested two dimensional photothermal deflection signals is directly displayed and shown that the testing laser induced damage of optical thin films by PTDM possesses many advantages such as direct display of damage and determination of damage threshold. And the method is available.

关 键 词：光学薄膜 激光损伤 光热偏转法 

分 类 号：TN247[电子电信—物理电子学] TB303[一般工业技术—材料科学与工程]