Blue emission from hydrogen-containing a-Si:H/SiO_2 multilayers and the investigation of its mechanism  

作　　者：ZHUDa MAZhongyuan MEIJiaxin HANPeigao HUANGXinfan CHENKenji 

机构地区：[1]StateKeyLaboratoryofSolidMicrostructureandDepartmentofPhysics,NanjingUniversity,Nanjing210093,China

出　　处：《Chinese Science Bulletin》2004年第18期1906-1910,共5页

摘　　要：A series of hydrogen-containing a-Si:H/SiO2 multilayers with different a-Si:H sublayer thickness were fabricated by layer-by-layer deposition and in situ plasma oxidation in a plasma-enhanced chemical vapor deposition system (PECVD). Optical induced blue emission from the samples was observed by the naked eye at room temperature, which has never been reported in the luminescence study of Si/SiO2 multilayers up to now. Both the photoluminescence (PL) peak and the absorption edge show a blue shift as the a-Si:H sublayer thickness decreases. The origin of the blue emission and the effect of hydrogen are discussed.A series of hydrogen-containing a-Si:H/SiO2 multilayers with different a-Si:H sublayer thickness were fabricated by layer-by-layer deposition and in situ plasma oxidation in a plasma-enhanced chemical vapor deposition system (PECVD). Optical induced blue emission from the samples was observed by the naked eye at room temperature, which has never been reported in the luminescence study of Si/SiO2 multilayers up to now. Both the photoluminescence (PL) peak and the absorption edge show a blue shift as the a-Si:H sublayer thickness decreases. The origin of the blue emission and the effect of hydrogen are discussed.

关 键 词：蓝色光发射 硅 纳米晶体 氧化硅 a-Si:H/SiO2多层 等离子体氧化 蓝色偏移 量子论 

分 类 号：O613.72[理学—无机化学] O641.121[理学—化学]