TDL-J60S激光晶体炉的开发研制  

Research and Development of the TDL-J60S Laser Crystal Growth Furnace

作　　者：董淑梅[1] 王庆[1] 

机构地区：[1]西安理工大学晶体生长设备研究所,西安710048

出　　处：《电子工业专用设备》2003年第6期51-54,共4页Equipment for Electronic Products Manufacturing

摘　　要：介绍了一种新开发的TDL-J60S激光晶体炉设备,设备的机械结构及电气控制,着重介绍 该设备的创新单元技术,上称重自动等径控制系统。This paper introduces a new Laser crystal growth furnace-TDL-J60S that developed newly, mechanical structure and electric control of the furnace, mainly introduces a innovation cell technology , automatic diameter control system.

关 键 词：激光单晶炉 提拉系统 自动控径 

分 类 号：TF806[冶金工程—有色金属冶金]