环境扫描电子显微镜工作原理及实现  

Principle and Realization of the Environmental Scanning Electron Microscope

作　　者：干蜀毅[1] 陈长琦[1] 朱武[1] 王先路[1] 

机构地区：[1]合肥工业大学机械与汽车工程学院,安徽合肥230009

出　　处：《真空电子技术》2003年第6期29-32,共4页Vacuum Electronics

摘　　要：系统介绍了环境扫描电子显微镜(ESEM)的研制历程和采用的关键技术。从常规扫描电子显微镜(SEM)的基本工作原理出发,列出了SEM成像信号产生的方式及特点。针对SEM在实际应用中暴露出的缺陷,ESEM提出了解决问题的措施。多重狭缝的采用,使样品室内压强可以大幅提高;而气体二次电子探头(GSED)的发明,使作为成像信号的二次电子信号得到加强。This paper systematically introduces the development of the environmental scanninge electron microscope (ESEM). Starting from the principle of conventional scanning electron microscope (SEM), the imaging signals used in SEM are listed. In order to eliminate the difficulties encountered in the application of SEM ,some key measures are taken in ESEM to imporve its imaging performance. The use of multiple-slot makes it possible for the pressure presented in the sample chamber to be much higher; the invention of the gaseous secondary electron detector greatly enhances the intensity of the imaging signal.

关 键 词：环境扫描电子显微镜(ESEM) 多重狭缝 成像信号 二次电子 ET探头 环境二次电子探头 气体二次电子探头 

分 类 号：TN16[电子电信—物理电子学]