激光烧蚀Al表面溅射Al正离子的平动能分布测定和机理研究  

Thanslational Energy Distribution Measurements of Al Ions Ejected from Excimer Laser Ablation of Aluminium and Mechanism Study

作　　者：方尔梯[1] 黄正宇[1] 张谊华[1] 何波 张抗战 李作坤 曾宪康[1] 

机构地区：[1]华东理工大学化学物理研究室,上海200237

出　　处：《应用激光》1993年第6期241-244,共4页Applied Laser

基　　金：国家自然科学基金

摘　　要：用柱面镜离子能量分析器测定了准分子激光烧蚀Al靶产生的Al^+和Al^(2+)离子的平动能分布,Al^+离子平动能分布主要由二组离子构成,最可几平动能分别为15eV和50eV,较高平动能组离子的产生有一个激光通量阈值,大约为0.9J/cm^2,对产生两组离子的不同机理进行了研究和讨论。We have used cylmdrical imrror energy analy of to measure the energy dis?l-butions of Al^+ and Al^(2+) lons produced by excimer laser ablation of Al surface. The results showthat there are two different energy distributions corresponding to the most probable energy valuesof 15eV and 50eV, respectively. For the higher energy ions, there is a laser ablation threshold of0.9J/cm^2. The physics of the ions formation process is discussed.

关 键 词：紫外激光 激光烧蚀 铝 铝离子 测定 

分 类 号：TN241[电子电信—物理电子学]